THE MECHANISM OF THE PLASMA POLYMERIZATION OF VINYLTRIMETHYLSILANE
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THE MECHANISM OF THE PLASMA POLYMERIZATION OF VINYLTRIMETHYLSILANE
Journal of Radiation Research and Radiation ProcessingVol. 10, Issue 4, Pages: 211-213(1992)
作者机构:
1.中国科学院长春应用化学研究所,长春 130022
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Lin Xiao, Yan Wenge, Ji Yiping, et al. THE MECHANISM OF THE PLASMA POLYMERIZATION OF VINYLTRIMETHYLSILANE. [J]. Journal of Radiation Research and Radiation Processing 10(4):211-213(1992)
DOI:
Lin Xiao, Yan Wenge, Ji Yiping, et al. THE MECHANISM OF THE PLASMA POLYMERIZATION OF VINYLTRIMETHYLSILANE. [J]. Journal of Radiation Research and Radiation Processing 10(4):211-213(1992)DOI:
THE MECHANISM OF THE PLASMA POLYMERIZATION OF VINYLTRIMETHYLSILANE
The gas condensates and polymers from plasma polymerization of VTMS in glow discharge were analyzed by means of GC-MS and PGC-MS, respectively. From the experimental results the reaction mechanism of polymerization of VTMS was deduced. Monomers were activated in the gas phase by electron bombardment and subsequently diffused to the substrate where they propagated and terminated.