Pentadecafluoro-octanoic acid 1-(4-benzoyl-phenoxymethyl)-2-hydroxy-ethyl ester(EBPFOA) was synthesized with (4-Oxiranylmethoxy-phenyl)-phenyl-methanone (EBP) and Pentadecafluorooctanoic acid (PFOA), which was characterized by FT-IR, 19F NMR, and UV absorption spectra. Real time infrared spectroscope (RT-IR) was applied to investigate the effects of different monomer system, various light intensity and concentration of photo-initiator on the polymerization kinetics and the ability of EBPFOA to overcome oxygen inhibition. The results indicate that the rate of polymerization (Rp) and final double bond conversion increase with increasing light intensity. In a certain range, the higher the concentration of initiator, the higher the double bond conversion and the faster the Rp. EBPFOA shows good ability to overcome the oxygen inhibition.Cited