Photosensitive resins were UV cured in air or under N,2, and surface energy of the cured films were measured. It was found that surface energy of the films cured in air is higher than the films cured under N,2,. Elemental analysis, ATR-FTIR and XPS analysis were performed. The results show that oxygen inhibition did not result in obvious change in oxygen content of the film cured in air, and the absorption band of peroxide group could not be observed. The surface of the films cured in air were rich in electron-withdrawing groups, whereas the films cured under N,2, were rich in carbon single bonds. The different curing atmospheres also resulted in the diversity of binding energy between Cls and O1s atoms on the surfaces. These indicate that different curing atmospheres cause changes in the curing rate, distribution of the compositions and density of the polymer, resulting in differences in chemical composition of the surface and surface energy of the films.