In order to investigate microstructure and chemical composition changes of titanium alloys by intense pulsed ion beam radiation, titanium alloys were bombarded by intense pulsed ion beams(70%H,+, and 30%C,+,)with energy density of 4.5 J/cm,2,.The microstructure and chemical compositions of cross-section of samples irradiated by ion beams were investigated with scanning electron microscope. The results show that titanium alloy samples are composed of two phases, belonging to the type of α+β titanium alloy. The microstructure is different in different areas; there are the same types of microstructure in most of areas. In some local areas, it is typical clostridium organization. The microstructures of titanium alloy irradiated by intense pulsed ion beams were changed with depth of tens of microns. The β-phase structure was damaged to some extent with the range of depth. The change in microstructure of titanium alloy irradiated by intense pulsed ion beams is due to thermal stress caused by surface temperature gradients and its spread in the target.