1.中国科学院上海应用物理研究所 嘉定园区 上海 201800
2.中国科学院大学 北京 100049
3.上海科技大学物质科学与技术学院 上海 200031
[ "何欣钟,男,1990年10月出生,2013年毕业于郑州大学,目前为中国科学院上海应用物理研究所在读硕士研究生,高分子化学与物理专业", "HE Xinzhong (male) was born in October 1990, and received his bachelor degree from Zhengzhou University in 2013. Now he is a master candidate in polymer chemistry and physics of Shanghai Institute of Applied Physics, Chinese Academy ofScience. E-mail:hexinzhong@sinap.ac.cn ." ]
吴国忠,博士,研究员,E-mail:wugz@sinap.ac.cn Ph.D. WU Guozhong, professor, E-mail:wugz@sinap.ac.cn
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何欣钟, 李荣, 高乾宏, 等. 低温等离子体接枝改性聚四氟乙烯薄膜表面无钯化学镀铜[J]. 辐射研究与辐射工艺学报, 2016,34(4):32-39.
Xinzhong HE, Rong LI, Qianhong GAO, et al. Low temperature plasma graft polymerization of acrylic acid on polytetrafluoroethylene film for Pd-free electroless copper deposition[J]. Journal of Radiation Research and Radiation Processing, 2016,34(4):32-39.
何欣钟, 李荣, 高乾宏, 等. 低温等离子体接枝改性聚四氟乙烯薄膜表面无钯化学镀铜[J]. 辐射研究与辐射工艺学报, 2016,34(4):32-39. DOI: 10.11889/j.1000-3436.2016.rrj.34.040301.
Xinzhong HE, Rong LI, Qianhong GAO, et al. Low temperature plasma graft polymerization of acrylic acid on polytetrafluoroethylene film for Pd-free electroless copper deposition[J]. Journal of Radiation Research and Radiation Processing, 2016,34(4):32-39. DOI: 10.11889/j.1000-3436.2016.rrj.34.040301.
通过低温等离子体接枝改性方法将丙烯酸(Acrylic acid,AAc)接枝聚合于聚四氟乙烯(Polytetrafluoroethylene,PTFE)薄膜表面,随后进行无钯化学镀铜,制备出表面镀铜的PTFE薄膜(PTFE-g-PAAc-Cu)。衰减全反射傅里叶变换红外光谱(ATR-FTIR)测试结果表明,丙烯酸成功地接枝于PTFE薄膜表面;通过扫描电镜(Scanning electron microscopy,SEM)和原子力显微镜(Atomic force microscopy,AFM)观察发现,镀铜均匀沉积于PTFE薄膜表面;3M胶带粘贴方法(ASTM D3359标准)评估结果表明,铜层与PTFE薄膜粘结牢固,3M胶带未能够将铜层与PTFE薄膜分离开;电性能测试结果表明,PTFE-,g,-PAAc-Cu的表面电阻(,R,s,)降至1.27×10,-2,Ω/sq,电阻率降至50.1μΩ·cm,其导电性由绝缘体提高到导体水平(导体的电阻率范围为1~10,3,μΩ·cm),有望在柔性覆铜板领域获得应用。
Acrylic acid (AAc) was grafted onto the surface of polytetrafluoroethylene (PTFE) film by low temperature plasma pretreatment. Subsequently, a thin copper layer was coated on the surface of the modified PTFE film (PTFE-g-PAAc) by palladium-free electroless copper deposition. Attenuated total reflectance Fourier transform infrared (ATR-FTIR) spectroscopy showed that acrylic acid was successfully grafted onto the surface of the PTFE film. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) showed that a thin copper layer was uniformly deposited on the surface of the PTFE film. 3M taping method assessment according to ASTM D3359 indicated that the copper layer was tightly bonded on the film so that 3M tape could not tear down the copper layer from the surface of PTFE film. Electrical performance showed that the surface resistance (,R,s,) and resistivity of PTFE-,g,-PAAc-Cu decreased to 1.27×10,-2,Ω/sq and 50.1 μΩ·cm, respectively. The conductivity was improved from an insulator to a conductor (1~103 μΩ·cm), which could be potentially used as the flexible copper clad.
聚四氟乙烯薄膜低温等离子体接枝改性丙烯酸化学镀铜
Polytetrafluoroethylene filmLow temperature plasmaGrafting modificationAcrylic acidElectroless copper depo-sition
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