剂量率切换辐照加速方法适用性的数值评估

张修瑜; 冯晓龙; 李鸿亮; 宋宇; 代刚

doi:10.11889/j.1000-3436.2017.rrj.35.010701

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剂量率切换辐照加速方法适用性的数值评估

辐射交叉学科研究 | 更新时间：2021-12-10

- 剂量率切换辐照加速方法适用性的数值评估
- Numerical evaluation on the feasibility of dose rate switching technique
- 辐射研究与辐射工艺学报 2017年35卷第1期页码：10701
- 作者机构：
  
  1.中国工程物理研究院电子工程研究所绵阳 621000
  2.中国工程物理研究院微系统与太赫兹研究中心成都 610200
- 作者简介：
  
  [ "张修瑜, 男, 1992年1月出生, 2014年获武汉大学工学学士学位, 目前为中物院研究生院硕士研究生, 研究方向为器件物理, E-mail:zhangxiuyu@mtrc.ac.cn", "ZHANG Xiuyu (male) was born in January 1992, and obtained bachelor's degree from Wuhan University in 2014. Nowhe is studying for a master's degree at Graduate School of CAEP, engaging in device physics, E-mail:zhangxiuyu@mtrc.ac.cn" ]
  代刚, 博士, 副研究员, E-mail:daigang@mtrc.ac.cnPh.D. DAI Gang, associate professor, E-mail:daigang@mtrc.ac.cn
- 基金信息：
  
  科学挑战专题(JCKY2016212A503);国家自然科学基金(SFC Grant No.11404300);中国工程物理研究院院长基金(President Funding of CAEP No.2014-1-100)
- DOI：10.11889/j.1000-3436.2017.rrj.35.010701
  中图分类号：
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张修瑜, 冯晓龙, 李鸿亮, 等. 剂量率切换辐照加速方法适用性的数值评估[J]. 辐射研究与辐射工艺学报, 2017,35(1):10701.

Xiuyu ZHANG, Xiaolong FENG, Hongliang LI, et al. Numerical evaluation on the feasibility of dose rate switching technique[J]. Journal of Radiation Research and Radiation Processing, 2017,35(1):10701.
张修瑜, 冯晓龙, 李鸿亮, 等. 剂量率切换辐照加速方法适用性的数值评估[J]. 辐射研究与辐射工艺学报, 2017,35(1):10701. DOI： 10.11889/j.1000-3436.2017.rrj.35.010701.

Xiuyu ZHANG, Xiaolong FENG, Hongliang LI, et al. Numerical evaluation on the feasibility of dose rate switching technique[J]. Journal of Radiation Research and Radiation Processing, 2017,35(1):10701. DOI： 10.11889/j.1000-3436.2017.rrj.35.010701.

摘要

为进行剂量率切换辐照加速方法适用性的数值评估，基于定量损伤物理模型和剂量率切换加速方法实验测试条件，以氢浓度、初始缺陷浓度和温度为变量，对金属绝缘层半导体（Metal insulator semiconductor，MIS）结构进行了系统的数值模拟。结果表明，剂量率切换辐照加速方法的适用性对双极器件氧化层内的氢浓度及缺陷浓度有很强的依赖。因此，剂量率切换加速方法的实验可能对部分器件和电路不再适用。

Abstract

For the sake of evaluating the feasibility of dose rate switching technique, systematic numerical simulations on the MIS (Metal insulator semiconductor) structure was done based on a quantitative physical model and the experimental conditions of dose rate switching technique, regarding hydrogen concentration, initial defect concentrations and temperature as variables. It turned out that the feasibility of the dose rate switching technique is strongly dependent on the hydrogen concentration and initial defects concentrations in the oxide layer of the bipolar devices. Therefore, the experiments of dose rate switching technique have possible failures on part of devices and circuits.

关键词

剂量率切换加速方法数值模拟氢浓度初始缺陷浓度

Keywords

Dose rate switchingAcceleration methodsNumerical simulationHydrogen concentrationInitial defect concentrations

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