The surface phase transformation and compositions distribution of Ti based alloy irradiated by intense pulsed ion beams were investigated by X-rays diffraction (XRD) and energy dispersive spectrometry line scanning (XEDS) respectively. The results show that the un-irradiated sample mainly is composed of α-Ti and β-Ti. The diffraction peaks of surface composition disappear while its roughness increases when the target irradiated by intense pulsed ion beam with a low energy density. The minor amorphous phase has been formed when the target is irradiated by IPIB with a moderate energy density. With many pulses, the increasing of Al and O elements has been found and it means that the formation of Al,2,O,3, which is favorable for the anti-oxidation improvement of Ti based alloy surface. With further increasing of energy density, two new phases- Al,6,MoTi and AlMoTi,2 ,appeared on the irradiated surface of target.