Yan Wenge, Chen Jie. THE STRUCTURE CHARACTER OF THE PLASMA COPOLYMERS OF VINYLTRIMETHYLSILANE WITH BENZEME, STYRENE AND HEXAFLUOROPROPYLENE[J]. Journal of Radiation Research and Radiation Processing, 1992,10(1):30-35.
Yan Wenge, Chen Jie. THE STRUCTURE CHARACTER OF THE PLASMA COPOLYMERS OF VINYLTRIMETHYLSILANE WITH BENZEME, STYRENE AND HEXAFLUOROPROPYLENE[J]. Journal of Radiation Research and Radiation Processing, 1992,10(1):30-35.DOI:
In a capacitively coupled RF glow discharge with external electrodes plasma copolymerizations of vinyltrimethylsilane (VTMS) with benzene(Bz), styrene(St) and hexafluoropropylene(HFP) were carried out.The structures of the copolymers were characterized with IR, ESCA, PGC/MS, and X-ray. It was found that the copolymerizations of VTMS with Bz, St and HFP have occurred. The increase of C/Si ratios of the copolymer indicates that the incorporation of Bz, St and HFP caused the change of the copolymer composition, and as a result, the Si content of the copolymer is relatively low. Si-H absorption peak does'nt appear in IR spectra.