PLASMA POLYMERIZATION OF VINYLDIMETHYLETHOXYSILANE
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PLASMA POLYMERIZATION OF VINYLDIMETHYLETHOXYSILANE
Journal of Radiation Research and Radiation ProcessingVol. 9, Issue 4, Pages: 243-245,242(1991)
作者机构:
1.中国科学院长春应用化学研究所,长春
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Zhou Heping, Zhou Maotang, Wang Shicai, et al. PLASMA POLYMERIZATION OF VINYLDIMETHYLETHOXYSILANE. [J]. Journal of Radiation Research and Radiation Processing 9(4):243-245,242(1991)
DOI:
Zhou Heping, Zhou Maotang, Wang Shicai, et al. PLASMA POLYMERIZATION OF VINYLDIMETHYLETHOXYSILANE. [J]. Journal of Radiation Research and Radiation Processing 9(4):243-245,242(1991)DOI:
PLASMA POLYMERIZATION OF VINYLDIMETHYLETHOXYSILANE
In a capacitively coupled discharge apparatus with external electrodes, vinyldimethylethoxysilane were polymerized, and the effects of system pressure, discharge power and substrate distance on the polymerization rate were studied. The polymer structure was researched by IR spectroscopy and XPS, some properties of the polymer such as thermostability and surface characteristics were also determined.