TiO,2, films immerging in PdCl,2, solution with [PdCl,2,] concentration at 10,-5, 10,-4, 10,-3, 10,-2, and 10,-1, mol/L respectively were irradiated by electron beam in order to deposit nano-cluster noble metal Pd. The irradiated films were characterized by XRD, XPS, FMSEM and UV-visible spectrometry. The results show that the Pd clusters with fcc crystal structure were 20-50 nm in diameter on the surface of TiO,2, films. Red shift was found in the absorption spectrum of modified Pd/TiO,2, films. The photocatalytic capability of the films were tested by degradation of methyl orange (MO) in aqueous solutions under both UV and visible light illumination. The photocatalytic experiments showed that the photocatalytic ability of Pd/TiO,2, under both UV and visible light irradiation could be improved dramatically.