THE STRUCTURE AND PROPERTIES OF THE PLASMA POLYMERIZED FILMS OF MIXTURES OF HEXAMETHYLDISILOXANE AND TETRAFLUOROMETHANE

Lin Xiao; Chen Jie; Xu Jiping

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THE STRUCTURE AND PROPERTIES OF THE PLASMA POLYMERIZED FILMS OF MIXTURES OF HEXAMETHYLDISILOXANE AND TETRAFLUOROMETHANE

更新时间：2024-11-05

- THE STRUCTURE AND PROPERTIES OF THE PLASMA POLYMERIZED FILMS OF MIXTURES OF HEXAMETHYLDISILOXANE AND TETRAFLUOROMETHANE
- Journal of Radiation Research and Radiation Processing Vol. 8, Issue 4, Pages: 231-234(1990)
- 作者机构：
  
  中国科学院长春应用化学研究所，长春
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：1990-11，
  
  Received：27 September 1989，
- 稿件说明：
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Lin Xiao, Chen Jie, Xu Jiping. THE STRUCTURE AND PROPERTIES OF THE PLASMA POLYMERIZED FILMS OF MIXTURES OF HEXAMETHYLDISILOXANE AND TETRAFLUOROMETHANE. [J]. Journal of Radiation Research and Radiation Processing, 1990,8(4):231-234.
DOI：

Lin Xiao, Chen Jie, Xu Jiping. THE STRUCTURE AND PROPERTIES OF THE PLASMA POLYMERIZED FILMS OF MIXTURES OF HEXAMETHYLDISILOXANE AND TETRAFLUOROMETHANE. [J]. Journal of Radiation Research and Radiation Processing, 1990,8(4):231-234. DOI：

摘要

在钟罩式内极反应器中进行了六甲基二硅氧烷（HMDSO）和四氟化碳（TFM）混合气体等离子体聚合。用IR、XPS、X射线对聚合胶结构进行了表征。等离子体共聚合膜中含有Si和F，聚合膜中元素组成依赖于起始混合气体单体的比，Si/C元素比随着混合气体中TFM浓度增加而减小，而F/C比增大。测定了复合膜的气体透过性，等离子体共聚合方法是制备气体分离膜的可行方法。同时，还测定了等离子体聚合膜的接触角，并计算了表面能。

Abstract

The plasma polymerization of mixtures of hexamethyldisiloxane(HMDSO) and tetrafluoromethane (TFM) was carried out in the bell jar type with internal electrode. The structure of polymerized films was characterized with IR

XPS

X-ray. HMDSO/TFM were plasma-copolymerized to yield films containing both silicon and fluorine residues. The elemental composition of the formed polymer films depended on the composition of the starting mixture. The Si/C atomic ratio decreased with increasing TFM concentration

whereas the F/C ratio increased. The gas permeability of these composite membrane was measured. The plasma copolymerization methods are available for the preparation of the membranes for gas separation. In addition

the properties of the plasma polymerized films were studied by contact angle measurements and surface energy count.

关键词

等离子体聚合HMDSOTFMXPS接触角气体分离膜

Keywords

Plasma polymerizationHexamethydisiloxaneTetrafluoromethane XPSContact angleGas separation membrane

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